- Original Paper
Kentaro Nagamatsu, Takumi Miyagawa, Atsushi Tomita, Hideki Hirayama, Yuusuke Takashima, Yoshiki Naoi, “High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy,”Scientific Reports, vol13,2023/2/10, 2438 (2023) .
Kentaro Nagamatsu, Takumi Miyagawa, Atsushi Tomita, Hideki Hirayama, Yuusuke Takashima, Yoshiki Naoi, “High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy,”Scientific Reports, vol13, 2438 (2023) , 2023/02/10
DOI：10.1038/s41598-023-29150-6
