- 原著論文
論文発表:High-temperature AlN growth by metalorganic vapor phase epitaxy on sputtered AlN with various thicknesses
永松謙太郎先生、直井美貴先生、髙島祐介先生らの論文「High-temperature AlN growth by metalorganic vapor phase epitaxy on sputtered AlN with various thicknesses」が掲載されました。
掲載誌等:Japanese Journal of Applied Physics, 65, 8, 08SP10, 2026.
DOI:10.35848/1347-4065/ae582a
著者:Yuto Matsubara, Koki Fujii, Yusuke Takayanagi, Yukiya Hayashi, Soki Shimizu, Yuki Kuwahara, Yuusuke Takashima, Yoshiki Naoi, Atsushi Maeoka, Atsushi Osawa, Shigeru Takatsuji, Takahiro Kimura and Kentaro Nagamatsu
DOI:10.35848/1347-4065/ae582a
著者:Yuto Matsubara, Koki Fujii, Yusuke Takayanagi, Yukiya Hayashi, Soki Shimizu, Yuki Kuwahara, Yuusuke Takashima, Yoshiki Naoi, Atsushi Maeoka, Atsushi Osawa, Shigeru Takatsuji, Takahiro Kimura and Kentaro Nagamatsu



